Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538665 | Gas supply system, substrate processing apparatus, and control method for gas supply system | Atsushi Sawachi | 2022-12-27 |
| 11513541 | Method of inspecting and inspection apparatus | Atsushi Sawachi | 2022-11-29 |
| 11326914 | Flow rate measurement apparatus and method for more accurately measuring gas flow to a substrate processing system | Risako Matsuda, Kazuyuki Miura | 2022-05-10 |
| 11231313 | Method of obtaining output flow rate of flow rate controller and method of processing workpiece | Risako Miyoshi | 2022-01-25 |
| 11227785 | Substrate transfer system and atmospheric transfer module | Toshiaki TOYOMAKI | 2022-01-18 |