Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538665 | Gas supply system, substrate processing apparatus, and control method for gas supply system | Norihiko Amikura | 2022-12-27 |
| 11513541 | Method of inspecting and inspection apparatus | Norihiko Amikura | 2022-11-29 |
| 11217432 | Gas supply system, plasma processing apparatus, and control method for gas supply system | — | 2022-01-04 |