Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11227785 | Substrate transfer system and atmospheric transfer module | Norihiko Amikura | 2022-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11227785 | Substrate transfer system and atmospheric transfer module | Norihiko Amikura | 2022-01-18 |