Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404279 | Etching method and substrate processing apparatus | Takahiro Ohori, Taiki Miura | 2022-08-02 |
| 11389617 | Sleep induction device and sleep induction method | — | 2022-07-19 |
| 11257662 | Annular member, plasma processing apparatus and plasma etching method | Shingo Kitamura, Koichi Kazama, Susumu Nogami, Tetsuji Sato | 2022-02-22 |