Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257662 | Annular member, plasma processing apparatus and plasma etching method | Koichi Kazama, Masahiro Ogasawara, Susumu Nogami, Tetsuji Sato | 2022-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257662 | Annular member, plasma processing apparatus and plasma etching method | Koichi Kazama, Masahiro Ogasawara, Susumu Nogami, Tetsuji Sato | 2022-02-22 |