Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404279 | Etching method and substrate processing apparatus | Takahiro Ohori, Masahiro Ogasawara | 2022-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404279 | Etching method and substrate processing apparatus | Takahiro Ohori, Masahiro Ogasawara | 2022-08-02 |