Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476130 | Substrate processing apparatus, substrate processing method, and storage medium | Kotaro Tsurusaki, Koji Yamashita, Kazuya Koyama | 2022-10-18 |
| 11469114 | Substrate processing system and substrate processing method | Kotaro Tsurusaki, Keiji Onzuka, Yoshihiro Kai | 2022-10-11 |
| 11430675 | Substrate processing apparatus and processing liquid reuse method | Hideaki Sato, Junichi Kitano | 2022-08-30 |