Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11498825 | Liquid quality managing device and method | Naoyuki Yamashita, Yasuhiro Kurabe, Shinsuke Mitsuhata, Takashi Wada, Kenji Kusunoki +2 more | 2022-11-15 |
| 11430675 | Substrate processing apparatus and processing liquid reuse method | Hideaki Sato, Kouzou Kanagawa | 2022-08-30 |
| 11410861 | Substrate liquid processing apparatus | Takashi Nagai, Hideaki Sato, Kenji Goto | 2022-08-09 |
| 11332357 | Liquid quality control device | Naoyuki Yamashita, Takashi Wada, Kenji Kusunoki | 2022-05-17 |