Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476130 | Substrate processing apparatus, substrate processing method, and storage medium | Koji Yamashita, Kazuya Koyama, Kouzou Kanagawa | 2022-10-18 |
| 11469114 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Keiji Onzuka, Yoshihiro Kai | 2022-10-11 |
| 11404294 | Substrate processing apparatus, substrate processing method, and storage medium | Kazuya Koyama, Koji Yamashita | 2022-08-02 |