Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532467 | Maintenance device | Takehiro Ueda, Kazuyuki Tezuka | 2022-12-20 |
| 11501995 | Plasma processing apparatus and mounting table thereof | Yohei Uchida | 2022-11-15 |
| 11443925 | Substrate support and plasma processing apparatus | Takehiro Ueda | 2022-09-13 |
| 11309168 | Vacuum processing apparatus and maintenance apparatus | Takehiro Ueda | 2022-04-19 |