Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532467 | Maintenance device | Jun Hirose, Kazuyuki Tezuka | 2022-12-20 |
| 11443925 | Substrate support and plasma processing apparatus | Jun Hirose | 2022-09-13 |
| 11387334 | Semiconductor device with electrode plating deposition | — | 2022-07-12 |
| 11309168 | Vacuum processing apparatus and maintenance apparatus | Jun Hirose | 2022-04-19 |