Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501995 | Plasma processing apparatus and mounting table thereof | Jun Hirose | 2022-11-15 |
| 11495445 | Plasma processing apparatus and plasma processing method | Yusuke Mizuno | 2022-11-08 |
| 11410871 | Workpiece placement apparatus and processing apparatus | Naoki Sugawa, Katsushi Abe, Tsuyoshi Hida | 2022-08-09 |