Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467496 | Substrate processing apparatus, method of adjusting parameters of coating module, and storage medium | — | 2022-10-11 |
| 11378388 | Substrate inspection method, substrate inspection apparatus and recording medium | Kazuya Hisano, Yasuaki Noda, Keisuke Hamamoto, Tadashi Nishiyama | 2022-07-05 |
| 11268912 | Substrate inspection method and substrate inspection apparatus | Kazuya Hisano | 2022-03-08 |