Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424111 | Sputtering target assembly to prevent overetch of backing plate and methods of using the same | Chen-Fang Chung, Wen-Cheng Cheng, Po-Wen Yang, Ming-Jie He, Cheng-Yi Teng | 2022-08-23 |