Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424111 | Sputtering target assembly to prevent overetch of backing plate and methods of using the same | Chen-Fang Chung, Wen-Cheng Cheng, Ming-Jie He, Yan-Zi Lu, Cheng-Yi Teng | 2022-08-23 |
| 11390520 | Systems and methods for uniform target erosion magnetic assemblies | Chen-Fang Chung, Wen-Cheng Cheng, Tsez-Chong Tsai, Shuen-Liang Tseng, Szu-Hsien Lo +1 more | 2022-07-19 |