Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424111 | Sputtering target assembly to prevent overetch of backing plate and methods of using the same | Chen-Fang Chung, Po-Wen Yang, Ming-Jie He, Yan-Zi Lu, Cheng-Yi Teng | 2022-08-23 |
| 11390520 | Systems and methods for uniform target erosion magnetic assemblies | Chen-Fang Chung, Tsez-Chong Tsai, Shuen-Liang Tseng, Szu-Hsien Lo, Po-Wen Yang +1 more | 2022-07-19 |
| 11322338 | Sputter target magnet | Ming-Jie He, Shawn Yang, Szu-Hsien Lo, Shuen-Liang Tseng, Chen-Fang Chung +2 more | 2022-05-03 |