Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521884 | Electrostatic chuck sidewall gas curtain | Ian Hsieh, Che-Fu Chen | 2022-12-06 |
| 11456203 | Wafer release mechanism | Che-Fu Chen | 2022-09-27 |
| 11417557 | Spiraling polyphase electrodes for electrostatic chuck | Chun Wang Chan, Jakub Rybczynski | 2022-08-16 |
| 11378237 | Illuminated Christmas tree decorative light control circuit | — | 2022-07-05 |
| 11368555 | Convert a device to a corresponding device according to seed image | Ji Pei, Hao Lu, Chunfeng Wang | 2022-06-21 |
| 11315815 | Wafer container and method for holding wafer | Po-Hsun Tseng, Wen-Han Tan, Hung-Wen Chen | 2022-04-26 |
| 11309207 | Grounding mechanism for multi-layer for electrostatic chuck, and related methods | Steven Donnell, Jakub Rybczynski, Chun Wang Chan | 2022-04-19 |