CC

Che-Fu Chen

TSMC: 3 patents #883 of 3,577Top 25%
Overall (2022): #86,840 of 548,613Top 20%
3
Patents 2022

Issued Patents 2022

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
11521884 Electrostatic chuck sidewall gas curtain Ian Hsieh, Yan Liu 2022-12-06
11456203 Wafer release mechanism Yan Liu 2022-09-27
11443966 Semiconductor processing flow field control apparatus and method Kai Wei 2022-09-13