Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11365115 | Piezoelectric anti-stiction structure for microelectromechanical systems | Fan Hu, Chun-Ren Cheng, Hsiang-Fu Chen | 2022-06-21 |
| 11289568 | Reduction of electric field enhanced moisture penetration by metal shielding | Chi-Yuan Shih, Kai-Fung Chang, Shih-Fen Huang, Yi-Chuan Teng, Yi Heng Tsai +9 more | 2022-03-29 |
| 11220422 | MEMS device | Fan Hu, Hsiang-Fu Chen, Chun-Ren Cheng | 2022-01-11 |