Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11491510 | Semiconductor device having microelectromechanical systems devices with improved cavity pressure uniformity | I-Hsuan Chiu, Chia-Ming Hung, Li Peng | 2022-11-08 |
| 11365115 | Piezoelectric anti-stiction structure for microelectromechanical systems | Fan Hu, Chun-Ren Cheng, Wen-Chuan Tai | 2022-06-21 |
| 11220422 | MEMS device | Fan Hu, Wen-Chuan Tai, Chun-Ren Cheng | 2022-01-11 |