Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11491510 | Semiconductor device having microelectromechanical systems devices with improved cavity pressure uniformity | Chia-Ming Hung, Li Peng, Hsiang-Fu Chen | 2022-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11491510 | Semiconductor device having microelectromechanical systems devices with improved cavity pressure uniformity | Chia-Ming Hung, Li Peng, Hsiang-Fu Chen | 2022-11-08 |