Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448975 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Yu-Piao Fang | 2022-09-20 |
| 11320745 | Measuring a process parameter for a manufacturing process involving lithography | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Omer Abubaker Omer Adam, Youping Zhang | 2022-05-03 |