Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448975 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Te-Chih Huang | 2022-09-20 |
| 11378892 | Overlay-shift measurement system | Yu-Ching Lee | 2022-07-05 |