Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11429027 | Photolithography method and apparatus | Ru-Gun Liu, Hsu-Ting Huang, Chin-Hsiang Lin | 2022-08-30 |
| 11320747 | Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device | Ru-Gun Liu, Hsu-Ting Huang, Kenji Yamazoe, Minfeng Chen, Shuo-Yen Chou +1 more | 2022-05-03 |
| 11295056 | Vertex-based OPC for opening patterning | — | 2022-04-05 |