Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11429027 | Photolithography method and apparatus | Shinn-Sheng Yu, Ru-Gun Liu, Chin-Hsiang Lin | 2022-08-30 |
| 11415890 | Method of mask data synthesis and mask making | Shih-Hsiang Lo, Ru-Gun Liu | 2022-08-16 |
| 11360379 | Photo mask data correction method | Fu An Tien, Ru-Gun Liu | 2022-06-14 |
| 11320747 | Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device | Shinn-Sheng Yu, Ru-Gun Liu, Kenji Yamazoe, Minfeng Chen, Shuo-Yen Chou +1 more | 2022-05-03 |