Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11374128 | Method and structure for air gap inner spacer in gate-all-around devices | Wei-Yang Lee, Chia-Pin Lin, Yuan-Ching Peng | 2022-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11374128 | Method and structure for air gap inner spacer in gate-all-around devices | Wei-Yang Lee, Chia-Pin Lin, Yuan-Ching Peng | 2022-06-28 |