Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527406 | Trench etching process for photoresist line roughness improvement | I-Chih Chen, Ching-Pei Hsieh, Kuan-Jung Chen | 2022-12-13 |
| 11271111 | Source/drain structure with barrier in FinFET device and method for forming the same | Ting-Chun Kuan, I-Chih Chen, Chih-Mu Huang, Fu-Tsun Tsai, Kuan-Jung Chen | 2022-03-08 |