Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527406 | Trench etching process for photoresist line roughness improvement | Sheng-Lin Hsieh, I-Chih Chen, Kuan-Jung Chen | 2022-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527406 | Trench etching process for photoresist line roughness improvement | Sheng-Lin Hsieh, I-Chih Chen, Kuan-Jung Chen | 2022-12-13 |