Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527380 | Ion implanter toxic gas delivery system | Ying Meng, Shih-Hao Lin | 2022-12-13 |
| 11411108 | Semiconductor device and manufacturing method thereof | Chih-Fen Chen, Ching Yu, Pin-Hen Lin, Yen Chuang, Yuh-Ta Fan | 2022-08-09 |
| 11355366 | Systems and methods for shuttered wafer cleaning | Tsui-Wei Wang, Yung-Li Tsai | 2022-06-07 |
| 11342202 | Automated wafer cleaning | Chun-Yu Lee, Sen-Yeo PENG | 2022-05-24 |
| 11282673 | Ion implantation system and source bushing thereof | Ying Meng, Nai-Han Cheng | 2022-03-22 |
| 11227780 | System and method for operating the same | Jia-Rong XIAO, Wei Huang, Sen-Yeo PENG | 2022-01-18 |