Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527380 | Ion implanter toxic gas delivery system | Chui-Ya Peng, Shih-Hao Lin | 2022-12-13 |
| 11282673 | Ion implantation system and source bushing thereof | Chui-Ya Peng, Nai-Han Cheng | 2022-03-22 |