Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11355366 | Systems and methods for shuttered wafer cleaning | Tsui-Wei Wang, Chui-Ya Peng | 2022-06-07 |
| 11282728 | Contamination control in semiconductor manufacturing systems | Bo Chen Chen, Sheng-Wei Wu | 2022-03-22 |