Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11474431 | Compound, resin, photoresist composition and process for producing photoresist pattern | Katsuhiro Komuro, Koji Ichikawa | 2022-10-18 |
| 11467490 | Salt, acid generator, resist composition and method for producing resist pattern | Yukako Anryu, Koji Ichikawa | 2022-10-11 |
| 11366387 | Salt, acid generator, resist composition and method for producing resist pattern | Takahiro Yasue, Koji Ichikawa | 2022-06-21 |
| 11327399 | Photoresist composition and process for producing photoresist pattern | Masahiko Shimada, Koji Ichikawa | 2022-05-10 |
| 11261273 | Resin, resist composition and method for producing resist pattern | Satoshi Yamaguchi, Koji Ichikawa | 2022-03-01 |
| 11214635 | Compound, resin, resist composition and method for producing resist pattern | Satoshi Yamaguchi, Koji Ichikawa | 2022-01-04 |