Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467490 | Salt, acid generator, resist composition and method for producing resist pattern | Tatsuro Masuyama, Koji Ichikawa | 2022-10-11 |
| 11378883 | Salt, acid generator, resist composition and method for producing resist pattern | Koji Ichikawa | 2022-07-05 |