Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11505524 | Salt, acid generator, resist composition and method for producing resist pattern | Jun Oguma, Koji Ichikawa | 2022-11-22 |
| 11474431 | Compound, resin, photoresist composition and process for producing photoresist pattern | Tatsuro Masuyama, Koji Ichikawa | 2022-10-18 |
| 11429025 | Salt, quencher, resist composition and method for producing resist pattern | Yuki Takahashi, Koji Ichikawa | 2022-08-30 |
| 11385542 | Salt, quencher, resist composition and method for producing resist pattern | Yuki Takahashi, Koji Ichikawa | 2022-07-12 |