Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480879 | Composition for forming silicon-containing resist underlayer film and patterning process | Tsutomu Ogihara, Tsukasa Watanabe, Yusuke Biyajima | 2022-10-25 |
| 11385544 | Composition for forming silicon-containing resist underlayer film and patterning process | Tsutomu Ogihara, Yusuke Biyajima, Tsukasa Watanabe, Masaki Ohashi | 2022-07-12 |