Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443938 | Substrate processing apparatus and substrate processing method | Joo Jib Park, Woo Young Kim | 2022-09-13 |
| 11367635 | Apparatus and method for treating substrate | Sangmin Lee, Woo Young Kim, Joo Jib Park | 2022-06-21 |
| 11361960 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Jeong-Yong Bae, Woo Young Kim, Hyun-Jung Lee, Se Jin Park +3 more | 2022-06-14 |