Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443938 | Substrate processing apparatus and substrate processing method | Boong Kim, Woo Young Kim | 2022-09-13 |
| 11367635 | Apparatus and method for treating substrate | Sangmin Lee, Woo Young Kim, Boong Kim | 2022-06-21 |