Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361960 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Woo Young Kim, Hyun-Jung Lee, Se Jin Park, Yong-Sun Ko +3 more | 2022-06-14 |