Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361960 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Jeong-Yong Bae, Woo Young Kim, Hyun-Jung Lee, Se Jin Park +3 more | 2022-06-14 |
| 11329053 | Semiconductor devices including enlarged contact hole and methods of forming the same | Yoon-Ho Son, Jae Uk Shin, Im-Soo Park, Sung-Yoon Chung | 2022-05-10 |