Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260429 | Substrate treating apparatus and substrate transporting method | Joji Kuwahara | 2022-03-01 |
| 11243469 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Yuji Tanaka, Masaya Asai | 2022-02-08 |