Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443968 | Substrate treating apparatus and substrate transporting method | — | 2022-09-13 |
| 11348812 | Substrate treating apparatus and substrate transporting method | — | 2022-05-31 |
| 11339011 | Substrate treating system and substrate transporting method | — | 2022-05-24 |
| 11302543 | Substrate carrier apparatus and substrate carrying method | — | 2022-04-12 |
| 11295974 | Substrate treating apparatus | — | 2022-04-05 |
| 11260429 | Substrate treating apparatus and substrate transporting method | Koji Kaneyama | 2022-03-01 |
| 11251060 | Substrate treating apparatus, carrier transporting method, and carrier buffer device | — | 2022-02-15 |
| 11231651 | Peripheral processing apparatus and peripheral processing method | Mitsuya Kusuhara | 2022-01-25 |