Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11281108 | Exposure device | You Arisawa, Masahiko Harumoto, Yuji Tanaka, Chisayo Mori, Tomohiro MOTONO +1 more | 2022-03-22 |
| 11243469 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Koji Kaneyama, Yuji Tanaka | 2022-02-08 |