Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11377733 | Fluorine-free tungsten deposition process employing in-situ oxidation and apparatuses for effecting the same | Fei Zhou, Raghuveer S. Makala, Rahul Sharangpani, Yusuke Mukae | 2022-07-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11377733 | Fluorine-free tungsten deposition process employing in-situ oxidation and apparatuses for effecting the same | Fei Zhou, Raghuveer S. Makala, Rahul Sharangpani, Yusuke Mukae | 2022-07-05 |