Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538660 | Plasma processing apparatus and method of fabricating semiconductor device using same | Yoong Chung, Nam-Kyun Kim, Naohiko Okunishi, Kyung-Sun Kim, Seung Bo Shim +1 more | 2022-12-27 |