Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11355314 | Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly | Yasushi Yasumatsu, Masashi Tsujiyama, Fumihito Suzuki | 2022-06-07 |
| 11270873 | Substrate processing apparatus and substrate processing method | Yuji Takanami, Kento Norota, Yasuo Kato, Yasushi Yasumatsu | 2022-03-08 |