Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508545 | Grid assembly and ion beam etching apparatus | Yasushi Yasumatsu, Kaori Motochi | 2022-11-22 |
| 11355314 | Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly | Yasushi Yasumatsu, Naoyuki Okamoto, Fumihito Suzuki | 2022-06-07 |