Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508545 | Grid assembly and ion beam etching apparatus | Masashi Tsujiyama, Kaori Motochi | 2022-11-22 |
| 11355314 | Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly | Naoyuki Okamoto, Masashi Tsujiyama, Fumihito Suzuki | 2022-06-07 |
| 11270873 | Substrate processing apparatus and substrate processing method | Yuji Takanami, Kento Norota, Naoyuki Okamoto, Yasuo Kato | 2022-03-08 |