Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11275312 | Systems and methods for verifying photomask cleanliness | James Dunphy, Hongqin Shi, David Hutchison, Yeh-Jiun Tung, Eric Copenhaver | 2022-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11275312 | Systems and methods for verifying photomask cleanliness | James Dunphy, Hongqin Shi, David Hutchison, Yeh-Jiun Tung, Eric Copenhaver | 2022-03-15 |