Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500295 | Systems and methods for contact immersion lithography | Hongqin Shi, James Dunphy, Cesar Gensoli | 2022-11-15 |
| 11385406 | Optical signal routing devices and systems | James Dunphy, David Hutchison, Pierre-Yves Droz | 2022-07-12 |
| 11275312 | Systems and methods for verifying photomask cleanliness | James Dunphy, Hongqin Shi, David Hutchison, Eric Copenhaver, Nao S. Chuei | 2022-03-15 |