Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500295 | Systems and methods for contact immersion lithography | Yeh-Jiun Tung, James Dunphy, Cesar Gensoli | 2022-11-15 |
| 11275312 | Systems and methods for verifying photomask cleanliness | James Dunphy, David Hutchison, Yeh-Jiun Tung, Eric Copenhaver, Nao S. Chuei | 2022-03-15 |